Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10607815 | Methods and apparatuses for plasma chamber matching and fault identification | Sathyendra Ghantasala, Hyun-Ho Doh | 2020-03-31 |
| 10553397 | Processing chamber hardware fault detection using spectral radio frequency analysis | Sathyendra Ghantasala, Hyun-Ho Doh | 2020-02-04 |