Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10533251 | Actuator to dynamically adjust showerhead tilt in a semiconductor processing apparatus | — | 2020-01-14 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10533251 | Actuator to dynamically adjust showerhead tilt in a semiconductor processing apparatus | — | 2020-01-14 |