Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10761517 | Extracting real-time data from EtherCAT sensor bus in a substrate processing system | Behzad Lajevardi, Willie Ku, Tom Trinh | 2020-09-01 |
| 10747210 | System and method for automating user interaction for semiconductor manufacturing equipment | Rainer Unterguggenberger, Chung-Ho Huang, Vincent Wong, David Hemker | 2020-08-18 |