Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10734238 | Atomic layer deposition and etch in a single plasma chamber for critical dimension control | Xiang Zhou, Yoshie Kimura, Chen Xu, Ganesh Upadhyaya, Mitchell Brooks | 2020-08-04 |
| 10658174 | Atomic layer deposition and etch for reducing roughness | Xiang Zhou, Naveed Ansari, Yoshie Kimura, Si Yi Li, Kazi Sultana +5 more | 2020-05-19 |