Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10861719 | Method and apparatus for processing wafer-shaped articles | David Mui, Alois Goller, Michael Ravkin | 2020-12-08 |
| 10720343 | Method and apparatus for processing wafer-shaped articles | David Mui, Alois Goller, Mike Ravkin | 2020-07-21 |