Issued Patents 2020
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10800661 | Preparation of Si-H containing iodosilanes via halide exchange reaction | Cole J. Ritter, III, Gennadiy Itov, Manish Khandelwal, Jean-Marc Girard, Glenn Kuchenbeiser +3 more | 2020-10-13 |
| 10710896 | Tungsten pentachloride conditioning and crystalline phase manipulation | Feng Li, Sonia Plaza, Jean-Marc Girard, Yumin Liu | 2020-07-14 |
| 10689405 | Titanium-containing film forming compositions for vapor deposition of titanium-containing films | Antonio Sanchez, Jean-Marc Girard, Grigory Nikiforov | 2020-06-23 |
| 10648087 | Etching reactants and plasma-free etching processes using the same | Clément Lansalot-Matras, Jooho LEE, Jean-Marc Girard, Satoko Gatineau | 2020-05-12 |
| 10584039 | Titanium-containing film forming compositions for vapor deposition of titanium-containing films | Antonio Sanchez, Jean-Marc Girard, Grigory Nikiforov | 2020-03-10 |