Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10768049 | High-resolution terahertz wave concentration module, scattered light detection module, and high-resolution inspection apparatus using terahertz Bessel beam | Sung-Wook Choi, Hyun-Joo Chang | 2020-09-08 |
| 10648864 | High-resolution terahertz wave concentration module, scattered light detection module, and high-resolution inspection apparatus using terahertz bessel beam | Sung-Wook Choi, Hyun-Joo Chang | 2020-05-12 |