Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10763152 | Substrate support unit, heat treatment unit, and substrate treating apparatus including the same | Cheolmin Choi, Sanguk Park, Man Kyu Kang | 2020-09-01 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10763152 | Substrate support unit, heat treatment unit, and substrate treating apparatus including the same | Cheolmin Choi, Sanguk Park, Man Kyu Kang | 2020-09-01 |