Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10859901 | Pellicle for EUV lithography and method of fabricating the same | Chang-Hun Lee, Ju-Hee HONG, Chul-Kyun PARK | 2020-12-08 |
| 10768523 | Pellicle for EUV lithography and method of fabricating the same | Chang-Hun Lee, Ju-Hee HONG, Chul-Kyun PARK | 2020-09-08 |