Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10859371 | Apparatus for inspecting substrate and method thereof | Deok Hwa Hong, Min-Kyu Kim, Jeong Hun Choi | 2020-12-08 |
| 10852125 | Apparatus for inspecting film on substrate by using optical interference and method thereof | Deok Hwa Hong, Min-Kyu Kim, Jeong Hun Choi | 2020-12-01 |