NZ

Nanchang Zhu

KL Kla-Tencor: 2 patents #58 of 345Top 20%
Overall (2020): #136,955 of 565,922Top 25%
2
Patents 2020

Issued Patents 2020

Showing 1–2 of 2 patents

Patent #TitleCo-InventorsDate
10663279 Dynamic determination of metal film thickness from sheet resistance and TCR value Xianghua Liu, Walter H. Johnson, Jianli Cui, Lu Yu, Juli Cheng +2 more 2020-05-26
10598477 Dynamic determination of metal film thickness from sheet resistance and TCR value Xianghua Liu, Walter H. Johnson, Jianli Cui, Lu Yu, Juli Cheng +2 more 2020-03-24