Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10777393 | Process condition sensing device and method for plasma chamber | Earl Jensen | 2020-09-15 |
| 10720350 | Etch-resistant coating on sensor wafers for in-situ measurement | Andrew Nguyen, Farhat A. Quli, Vasudev Venkatesan | 2020-07-21 |