Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10788759 | Prediction based chucking and lithography control optimization | Bin-Ming Benjamin Tsai, Oreste Donzella, Pradeep Vukkadala | 2020-09-29 |
| 10576603 | Patterned wafer geometry measurements for semiconductor process controls | Pradeep Vukkadala | 2020-03-03 |