Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10809055 | Apparatus and method for measuring topography and gradient of the surfaces, shape, and thickness of patterned and unpatterned wafers | — | 2020-10-20 |
| 10732424 | Inspection-beam shaping on a sample surface at an oblique angle of incidence | Zhiwei Xu, Qing Li | 2020-08-04 |