Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10825770 | Semiconductor device having a stack body including metal films and first insulating films alternately stacked on a semiconductor substrate and including a stepped end portion and manufacturing method thereof | Akitsugu Hatazaki, Hiroko Tahara, Masayuki Kitamura, Takashi Ohashi | 2020-11-03 |
| 10590532 | Semiconductor manufacturing apparatus and method of manufacturing semiconductor device | — | 2020-03-17 |