Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10804113 | Manufacturing method of semiconductor device and etching gas | Toshiyuki Sasaki, Tomo HASEGAWA | 2020-10-13 |
| 10529582 | Plasma etching method and method of fabricating semiconductor device | — | 2020-01-07 |