Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10692708 | Sputtering cathode, sputtering device, and method for producing film-formed body | Hiroshi Iwata, Toshiyuki NEDU, Yuta TAKAKUWA, Naoya Okada, Naonori SHIBATA +1 more | 2020-06-23 |