Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10867821 | Substrate transfer robot and method of teaching edge position of target body | Tetsuya Yoshida | 2020-12-15 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10867821 | Substrate transfer robot and method of teaching edge position of target body | Tetsuya Yoshida | 2020-12-15 |