Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10629449 | Gas composition for dry etching and dry etching method | Korehito KATO, Tetsuya FUKASAWA, Yoshihiko Iketani | 2020-04-21 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10629449 | Gas composition for dry etching and dry etching method | Korehito KATO, Tetsuya FUKASAWA, Yoshihiko Iketani | 2020-04-21 |