Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10640372 | Method for fabricating MEMS device integrated with a semiconductor integrated circuit | Tsong-Lin Shen, Chih-Cheng Wang, Yu-Chih Chuang, Sheng-Wei Hung, Min-Hung Wang +1 more | 2020-05-05 |