Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10852648 | Mask pattern correction system, and semiconductor device manufacturing method utilizing said correction system | Kazuyuki Hino, Hiromitsu Mashita, Masahiro Miyairi, Hiroshi Yoshimura, Sachiyo Ito +4 more | 2020-12-01 |