Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10714897 | Distributed feedback semiconductor laser | Shinji Saito, Tsutomu KAKUNO, Akira Tsumura | 2020-07-14 |
| 10599056 | Position measuring method, position measuring apparatus, and semiconductor device manufacturing method | Miki Toshima, Yosuke Okamoto | 2020-03-24 |