Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10818535 | Plasma processing-apparatus processing object support platform, plasma processing apparatus, and plasma processing method | — | 2020-10-27 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10818535 | Plasma processing-apparatus processing object support platform, plasma processing apparatus, and plasma processing method | — | 2020-10-27 |