Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10636621 | Charged particle beam device for moving an aperture having plurality of openings and sample observation method | Akinari HANAWA, Hideki Kikuchi, Yoshifumi Taniguchi, Toshie Yaguchi, Keitaro Watanabe +1 more | 2020-04-28 |