Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10684126 | Apparatus and method for layer thickness measurement for a vapor deposition method | Matthias Gang, Michael Schäfer, Jens Schuster, Ralf Sorgenfrei, Georg Voorwinden | 2020-06-16 |