Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10801106 | Shower plate structure for exhausting deposition inhibiting gas | Ryoko Yamada, Kazuo Sato | 2020-10-13 |
| 10599347 | Information processing system, information processing apparatus, and method for controlling information processing system | Masanori Higeta | 2020-03-24 |