Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10679844 | Optimal exposure of a bottom surface of a substrate material and/or edges thereof for cleaning in a spin coating device | Thanh Truong, Tri T. Dang, Tu Tran | 2020-06-09 |