Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10844474 | Cathode unit for sputtering apparatus | Shinya Nakamura | 2020-11-24 |
| 10763153 | Holding apparatus | Junichi Itoh, Hidenori Fukumoto, Kosuke Hidaka, Mitsuki Terashima | 2020-09-01 |