Issued Patents 2020
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10663504 | Field-biased second harmonic generation metrology | Marc Kryger, John Changala | 2020-05-26 |
| 10613131 | Pump and probe type second harmonic generation metrology | Marc Kryger, John Changala | 2020-04-07 |
| 10591525 | Wafer metrology technologies | Marc Kryger, John Changala | 2020-03-17 |
| 10551325 | Systems for parsing material properties from within SHG signals | Marc Kryger, John Changala, Jianing Shi | 2020-02-04 |