Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10809637 | Learning based digital corrections to compensate variations on lithography systems with multiple imaging units | — | 2020-10-20 |
| 10599055 | Self aligning systems and methods for lithography systems | Rudolf Brunner | 2020-03-24 |
| 10585360 | Exposure system alignment and calibration method | Qin Zhong | 2020-03-10 |