Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10622226 | Method and apparatus for cleaning component of substrate processing apparatus | Bongkyu Shin, Byeol Han, Hyun-Joong Kim | 2020-04-14 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10622226 | Method and apparatus for cleaning component of substrate processing apparatus | Bongkyu Shin, Byeol Han, Hyun-Joong Kim | 2020-04-14 |