Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10794928 | Microelectromechanical component | Benny Pekka Herzogenrath, Denis Gugel, Rolf Scheben | 2020-10-06 |
| 10739373 | Micromechanical spring for a sensor element | Monika Koster | 2020-08-11 |
| 10544033 | Micromechanical component | Stefano Cardanobile | 2020-01-28 |