Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10755897 | Plasma processing apparatus and plasma processing method | Kazuya Yamada, Naoki Yasui | 2020-08-25 |
| 10699884 | Plasma processing apparatus and plasma processing method | Kazuya Yamada, Koichi Yamamoto, Naoki Yasui, Isao Mori | 2020-06-30 |