Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10541169 | Method and system for balancing the electrostatic chucking force on a substrate | Chong Jiang, Lei Jing, Adolph Miller Allen, Michael W. Johnson, Pallavi Zhang +1 more | 2020-01-21 |