Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10607874 | Electrostatic chuck | Kengo Maehata, Shumpei KONDO, Hitoshi Sasaki, Yuichi Yoshii | 2020-03-31 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10607874 | Electrostatic chuck | Kengo Maehata, Shumpei KONDO, Hitoshi Sasaki, Yuichi Yoshii | 2020-03-31 |