JB

Jason R. Beringer

AT Axcelis Technologies: 1 patents #10 of 30Top 35%
Overall (2020): #437,308 of 565,922Top 80%
1
Patents 2020

Issued Patents 2020

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
10774419 Implantation using solid aluminum iodide (ALI3) for producing atomic aluminum ions and in situ cleaning of aluminum iodide and associated by-products Dennis Elliott Kamenitsa, Richard J. Rzeszut, Fernando M. Silva, Xiangyang Wu 2020-09-15