Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10774419 | Implantation using solid aluminum iodide (ALI3) for producing atomic aluminum ions and in situ cleaning of aluminum iodide and associated by-products | Richard J. Rzeszut, Fernando M. Silva, Jason R. Beringer, Xiangyang Wu | 2020-09-15 |