Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10727059 | Highly etch selective amorphous carbon film | Sarah Michelle Bobek, Prashant Kumar Kulshreshtha, Rajesh Prasad, Kwangduk Douglas Lee, Hidetaka Oshio +2 more | 2020-07-28 |