Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10649471 | Method and apparatus for pulse gas delivery with isolation valves | Junhua Ding, Michael L'Bassi | 2020-05-12 |
| 10557736 | Predictive diagnostics systems and methods using vacuum pressure control valves | David Brian Chamberlain, Vladislav Davidkovich, Scott Benedict | 2020-02-11 |
| 10535506 | Method and apparatus for deposition cleaning in a pumping line | Scott Benedict, Kevin W. Wenzel | 2020-01-14 |