FS

Fernando M. Silva

AT Axcelis Technologies: 1 patents #10 of 30Top 35%
Overall (2020): #474,071 of 565,922Top 85%
1
Patents 2020

Issued Patents 2020

Patent #TitleCo-InventorsDate
10774419 Implantation using solid aluminum iodide (ALI3) for producing atomic aluminum ions and in situ cleaning of aluminum iodide and associated by-products Dennis Elliott Kamenitsa, Richard J. Rzeszut, Jason R. Beringer, Xiangyang Wu 2020-09-15