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Companies
Inventors
DR
Denis A. Robitaille
AT
Axcelis Technologies
: 1 patents #10 of 30
Top 35%
Overall (2020):
#491,903
of 565,922
Top 90%
1
Patents 2020
Issued Patents
2020
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Patent #
Title
Co-Inventors
Date
10714296
Ion source with tailored extraction shape
Patrick T. Heres
2020-07-14
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