PH

Patrick T. Heres

AT Axcelis Technologies: 1 patents #10 of 30Top 35%
Overall (2020): #322,097 of 565,922Top 60%
1
Patents 2020

Issued Patents 2020

Patent #TitleCo-InventorsDate
10714296 Ion source with tailored extraction shape Denis A. Robitaille 2020-07-14