DP

Daniel Peter

Lam Research: 1 patents #178 of 457Top 40%
Overall (2020): #497,500 of 565,922Top 90%
1
Patents 2020

Issued Patents 2020

Patent #TitleCo-InventorsDate
10741405 Selective self-aligned patterning of silicon germanium, germanium and type III/V materials using a sulfur-containing mask Samantha Tan, Reza Arghavani, Yang Pan 2020-08-11