Issued Patents 2020
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10788744 | Extreme ultraviolet lithography mask blank manufacturing system and method of operation therefor | Ralf Hofmann, Majeed A. Foad | 2020-09-29 |
| 10633253 | Method for carbon nanotube purification | John Provine, Gregory Michael Pitner | 2020-04-28 |
| 10551731 | Glass ceramic for ultraviolet lithography and method of manufacturing thereof | Ralf Hofmann, Majeed A. Foad | 2020-02-04 |
| 10551732 | Extreme ultraviolet mask blank production system with thin absorber and manufacturing system therefor | Vinayak Vishwanath Hassan, Majeed A. Foad, Ralf Hofmann | 2020-02-04 |