Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10658204 | Spin chuck with concentrated center and radial heating | Michael PUGGL, Gerhard Mueller, Henry Roger Osner, Karl-Heinz Hohenwarter, Ulrich Tschinderle +1 more | 2020-05-19 |
| 10651097 | Using identifiers to map edge ring part numbers onto slot numbers | Evelio Sevillano, Thomas Chang, Robert O'Donnell, Ronda Ropes, Peter R. Wassei | 2020-05-12 |