Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10867795 | Method of etching hardmasks containing high hardness materials | Nancy Fung, Gene S. Lee, Hailong Zhou, Zohreh Hesabi, Shan Jiang +3 more | 2020-12-15 |
| 10636675 | Methods of etching metal-containing layers | Gene Lee, Abhijit Patil, Shan Jiang, Zohreh Hesabi | 2020-04-28 |