Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10850973 | Methods for CMOS-MEMS integrated devices with multiple sealed cavities maintained at various pressures | Michael Julian Daneman, Martin Lim, Igor Tchertkov | 2020-12-01 |
| 10532926 | Methods for CMOS-MEMS integrated devices with multiple sealed cavities maintained at various pressures | Michael Julian Daneman, Martin Lim, Igor Tchertkov | 2020-01-14 |