Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10619243 | Method to improve precursor utilization in pulsed atomic layer processes | Triratna P. Muneshwar | 2020-04-14 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10619243 | Method to improve precursor utilization in pulsed atomic layer processes | Triratna P. Muneshwar | 2020-04-14 |