Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10577466 | Ordered nanoscale domains by infiltration of block copolymers | Seth B. Darling, Jeffrey W. Elam, Qing Peng | 2020-03-03 |
| 10571803 | Sequential infiltration synthesis for enhancing multiple-patterning lithography | Seth B. Darling, Jeffrey W. Elam | 2020-02-25 |