Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10566426 | Forming silicon oxide layers by radical oxidation and semiconductor device with silicon oxide layer | Anton Mauder, Oliver Hellmund, Peter Irsigler, Jens Peter Konrath, David Laforet +5 more | 2020-02-18 |